VSM – Smartline™ Vacuum Transducer
Absolute Pressure 1000 to 5 x 10-9 mbar (=hPa), 750 – 5 x 10-9 Torr
The digital combination transducer VSM (Pirani/cold cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors.
Smartline represents cutting edge technology providing safe, precise and cost effective process control.
Benefits
- Wide range sensor Pirani / cold cathode
- Pirani with extended range allows operation of cold cathode at lower pressure and increases lifetime
- Robust sensor design, insensitive against inrush of air
- Digital RS485 interface and analog output signal 1.819-8.6 V or EtherCAT
- Automatic baud rate detection 9.6 kBd to 115 kBd
- Optionally large, integrated LCD display with background illumination (VSM77DL, VSM79DL)
- Two independent, potential-free relay switch points
- Easily replaceable sensor heads with stored calibration data
Typical Applications
- Mass spectrometry
- Coating plants and vapor deposition
- Measuring and controlling in fine and ultrahigh vacuum
- Process engineering
- Sputtering plants
- Vacuum furnaces
